X, Y Performance |
14 x 14 |
28 x 24 |
| Travel |
360x360mm |
720x600mm |
Linear Accuracy, Overall |
3.0μm |
5.0μm |
Repeatability |
1.0μm |
1.0μm |
Scale Resolution |
0.5μm, 0.1μm optional |
0.5μm, 0.1μm optional |
Max. Velocity |
430mm/s |
710mm/s |
Max. Acceleration |
0.1G |
0.1G |
Z Performance |
Travel |
138mm |
138mm |
Linear Accuracy, Overall |
10μm |
10μm |
Scale Resolution |
0.5μm |
0.5μm |
Speed |
50mm/s |
50mm/s |
Repeatability (Mechanical) |
2.5μm |
2.5μm |
Repeatability (Focus) |
2.5μm at 250x Video
(on optimum specimen) |
2.5μm at 250x Video
(on optimum specimen) |
Physical Specifications |
Surface Area |
430x400mm |
790x735mm |
| Working Height |
1015mm |
1015mm |
External Dimensions |
L965xW1090xH1800mm |
L1320xW1550xH1800mm |
Weight |
5500kg |
7700kg |
Capacity |
55kg |
55kg |
Base Material |
Granite |
Granite |
Ways, X & Y |
Granite |
Granite |
| Bearings, X & Y |
Air |
Air |
| Bearings, Z |
Linear Ways |
Linear Ways |
Requirements |
Air Pressure
Flow Rate |
80 PSI minimum
Max. Consumption 5 CFM |
Clean & Dry
Max. Consumption 5 CFM |
Power |
110/220 V, 50/60 Hz, 10A |
110/220 V, 50/60 Hz, 10A |
Temperature, Ambient
Allowable Variation |
68oF (20oC)
1oC/hour, 1.7oC/24hour |
68oF (20oC)
1oC/hour, 1.7oC/24hour |
Features |
Optics & Magnification |
6.5:1 Zoom Range, 20-250x |
6.5:1 Zoom Range, 20-250x |
Video |
Hi-Res, Solid State, B/W |
Hi-Res, Solid State, B/W |
| Profile Light |
Programmable Intensity Monochromatic LED |
Programmable Intensity Monochromatic LED |
| Surface Light |
Programmable Intensity/Direction Monochromatic LED Ring White Light Ring |
Programmable Intensity/Direction Monochromatic LED Ring White Light Ring |
| MOTORS |
Linear Servo DSP Control for X/Y; Rotary Servo for Z |
Linear Servo DSP Control for X/Y; Rotary Servo for Z |
SOFTWARE/
ELECTRONICS |
InSpec Metrology Software with Pentium Processor |
InSpec Metrology Software with Pentium Processor |
CONTROLS |
Joystick for X, Y & Z |
Joystick for X, Y & Z |
